WO3, SiO2, and TiO2 films with hydrophilic property are deposited by rf-magnetron sputtering. Their wettability is strongly depends on the presence or absence of the oxygen plasma etching on the glass substrates. The TiO2 film of 50 nm-thick on the plasma etched glass shows a water contact angle (WCA) below 5o which means a super-hydrophilic surface. However, WCA values are gradually degraded when the films are exposed under atmosphere, especially WO3. In order to improve hydrophilic property, the degraded films can be again recovered by UV illumination for 10 sec using UV-light and the TiO2 film shows a super-hydrophilic surface about 3o.
