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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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전자 세라믹 : 그래핀 하부전극을 이용하여 BMNO 케페시터의 특성 향상을 위한Ti Adhesion Layer의 효과

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Regular Paper : Effect of Ti Adhesion Layer on the Electrical Properties of BMNO Capacitor Using Graphene Bottom Electrodes

Byeong Ju Park, Soon Gil Yoon
J Electr Electron Mater 2013;26(12):867-871.
Published online: December 1, 2013
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The Ti adhesion layers were deposited onto the glass substrate for transparent capacitors using Bi2Mg2/3Nb4/3O7 (BMNO) dielectric thin films. Graphene was transferred onto the Ti/glass substrate after growing onto the Ni/SiO2/Si using rapid-thermal pulse CVD (RTPCVD). The BMNO dielectric thin films were investigated for the microstructure, dielectric and leakage properties in the case of capacitors with and without Ti adhesion layers. Leakage current and dielectric properties were strongly dependent on the Ti adhesion layers grown for graphene bottom electrode.

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Regular Paper : Effect of Ti Adhesion Layer on the Electrical Properties of BMNO Capacitor Using Graphene Bottom Electrodes
J Electr Electron Mater. 2013;26(12):867-871.   Published online December 1, 2013
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Regular Paper : Effect of Ti Adhesion Layer on the Electrical Properties of BMNO Capacitor Using Graphene Bottom Electrodes
J Electr Electron Mater. 2013;26(12):867-871.   Published online December 1, 2013
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