In this paper, the properties of SnZnO films obtained from solution process with different component fractions were compared. The thermal behavior of the SnZnO solutions showed only a slight change according to the component fraction change. However, the definite changes were revealed at the structural properties of the SnZnO films. With diverse analyses, the origin of the changes was proved to the influence of phase change from SnO2 to ZnO in SnZnO lattice. With the SnO2-phase-dominant SnZnO, the highest field effect mobility and on/off ratio of about 8.6 cm2/Vs and 2 × 108 were achieved, respectively.
