The Dielectric Properties of Triple SiO Thin Film using Spectroscopic Ellipsometer

Chang Suk Kim; Suck Young Hwang

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Spectroscopic Ellipsometer 를 이용한 삼원 SiO 박막의 증착조건에 따른 유전율특성

김창석, 황석영

The Dielectric Properties of Triple SiO Thin Film using Spectroscopic Ellipsometer

Chang Suk Kim, Suck Young Hwang

J Electr Electron Mater 1995;8(2):129-135.

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The Dielectric Properties of Triple SiO Thin Film using Spectroscopic Ellipsometer

J Electr Electron Mater. 1995;8(2):129-135.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Dielectric Properties of Triple SiO Thin Film using Spectroscopic Ellipsometer

J Electr Electron Mater. 1995;8(2):129-135.

Articles

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Spectroscopic Ellipsometer 를 이용한 삼원 SiO 박막의 증착조건에 따른 유전율특성

The Dielectric Properties of Triple SiO Thin Film using Spectroscopic Ellipsometer

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