Abstract: Cu doped SnO(2) thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at 500℃ in air, respectively. Structural properties of SnO(2) by X-ray diffraction showed (110), (101) and (211) dominant tetragonal phase. The effects of catalyst Cu in SnO(2)-based gas sensors were investigated. Sensitivity of SnO(2):Cu sensors to 2,000 ppm CO(2) gas and 50 ppm H(2)S gas was investigated for various Cu concentration. The highest sensitivity to CO(2) gas and H(2)S gas of Cu doped SnO(2) gas sensors was observed at the 8 wt% and 12 wt% Cu concentration, respectively. The improved sensitivity in the Cu doped SnO(2) gas sensors was explained by decrease of electron depletion region in Cu and SnO(2) junction, and increase of reactive oxygen and surface area in the SnO(2).
