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폴리이미드 기판 위에 RF 마그네트론 스퍼터링 공정으로 중착된 ZnOGa 박막의 특성

박승범, 김정연, 김병국, 임종엽, 여인환, 안상기, 권순용, 박재환, 임동건

Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

Seung Beum Park, Jeong Yeon Kim, Byeong Guk Kim, Jong Youb Lim, In Hwan Yeo, Sang Ki Ahn, Soon Yong Kweon, Jae Hwan Park, Dong Gun Lim
J Electr Electron Mater 2010;23(5):374-378.
Published online: May 1, 2010
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Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering
J Electr Electron Mater. 2010;23(5):374-378.   Published online May 1, 2010
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering
J Electr Electron Mater. 2010;23(5):374-378.   Published online May 1, 2010
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