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공정 변수에 따른 비정질 인듐갈륨징크옥사이드 산화물 반도체 트랜지스터의 전기적 특성 연구

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Study on the Electrical Properties of a-IGZO TFTs Depending on Processing Parameters

Eu Gene Chong, Kyoung Chol Jo, Seung Han Kim, Sang Yeol Lee
J Electr Electron Mater 2010;23(5):349-352.
Published online: May 1, 2010
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Study on the Electrical Properties of a-IGZO TFTs Depending on Processing Parameters
J Electr Electron Mater. 2010;23(5):349-352.   Published online May 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Study on the Electrical Properties of a-IGZO TFTs Depending on Processing Parameters
J Electr Electron Mater. 2010;23(5):349-352.   Published online May 1, 2010
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