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RF 스퍼터법을 사용한 La0.6Sr0.4MnO3 박만 제조 및 미세구조와 전기전도 특성

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Preparation of La0.6Sr0.4MnO3 Thin Films by RF Magnetron Sputtering and Their Microstructure and Electrical Conduction Properties

Chang Sun Park, Ho Jung Sun
J Electr Electron Mater 2010;23(4):303-310.
Published online: April 1, 2010
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Preparation of La0.6Sr0.4MnO3 Thin Films by RF Magnetron Sputtering and Their Microstructure and Electrical Conduction Properties
J Electr Electron Mater. 2010;23(4):303-310.   Published online April 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Preparation of La0.6Sr0.4MnO3 Thin Films by RF Magnetron Sputtering and Their Microstructure and Electrical Conduction Properties
J Electr Electron Mater. 2010;23(4):303-310.   Published online April 1, 2010
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