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신경회로망을 이용한 ITO 박막 성장 공정의 모형화

민철홍, 박성진, 윤능구, 김태선

Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network

Chul Hong Min, Sung Jin Park, Neung Goo Yoon, Tae Seon Kim
J Electr Electron Mater 2009;22(9):741-746.
Published online: September 1, 2009
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Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network
J Electr Electron Mater. 2009;22(9):741-746.   Published online September 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Modeling of Indium Tin Oxide(ITO) Film Deposition Process using Neural Network
J Electr Electron Mater. 2009;22(9):741-746.   Published online September 1, 2009
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