Local Oxidation of 4H-SiC using an Atomic Force Microscopy

Yeong Deuk Jo; Wook Bahng; Sang Cheol Kim; Nam Kyun Kim; Sang Mo Koo

Articles

Page Path

원자현미경을 이용한 탄화규소 (SiC)의 국소산화

조영득, 방욱, 김상철, 김남균, 구상모

Local Oxidation of 4H-SiC using an Atomic Force Microscopy

Yeong Deuk Jo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo

J Electr Electron Mater 2009;22(8):632-636.
Published online: August 1, 2009

6 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: Atomic torce microscopy, AFM, Local oxidation, Silicon carbide, 2-D simulation

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Local Oxidation of 4H-SiC using an Atomic Force Microscopy

J Electr Electron Mater. 2009;22(8):632-636. Published online August 1, 2009

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Local Oxidation of 4H-SiC using an Atomic Force Microscopy

J Electr Electron Mater. 2009;22(8):632-636. Published online August 1, 2009

Articles

Page Path

원자현미경을 이용한 탄화규소 (SiC)의 국소산화

Local Oxidation of 4H-SiC using an Atomic Force Microscopy

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS