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금속유기분해법으로 제조한 ZrTiO4 박막의 미세구조 및 고주파 유전특성

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Microstructure and Microwave Dielectric Properties of ZrTiO4 Thin Films Prepared by Metal-organic Decomposition

Chang Sun Park, Ho Jung Sun
J Electr Electron Mater 2009;22(1):53-60.
Published online: January 1, 2009
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Microstructure and Microwave Dielectric Properties of ZrTiO4 Thin Films Prepared by Metal-organic Decomposition
J Electr Electron Mater. 2009;22(1):53-60.   Published online January 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Microstructure and Microwave Dielectric Properties of ZrTiO4 Thin Films Prepared by Metal-organic Decomposition
J Electr Electron Mater. 2009;22(1):53-60.   Published online January 1, 2009
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