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스윙 암 컨디셔너의 기구학적 해석의 통한 CMP 패드 프로파일 변화에 관한 연구

오지헌, 이상직, 이호준, 조한철, 이현섭, 김형재, 정해도

A Study on Pad Profile Variation using Kinematical Analysis on Swing Arm Conditioner

Ji Heon Oh, Sang Jik Lee, Ho Jun Lee, Han Chul Cho, Hyun Seop Lee, Hyoung Jae Kim, Hae Do Jeong
J Electr Electron Mater 2008;21(11):963-967.
Published online: November 1, 2008
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A Study on Pad Profile Variation using Kinematical Analysis on Swing Arm Conditioner
J Electr Electron Mater. 2008;21(11):963-967.   Published online November 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on Pad Profile Variation using Kinematical Analysis on Swing Arm Conditioner
J Electr Electron Mater. 2008;21(11):963-967.   Published online November 1, 2008
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