Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

실리콘 질화막의 산화

정양희, 이영선, 박영걸

The Oxidation of Silicon Nitride Layer

Yang hui Chung, Young sun Lee, Young guol Park
J Electr Electron Mater 1994;7(3):231-235.
  • 4 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev next

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

The Oxidation of Silicon Nitride Layer
J Electr Electron Mater. 1994;7(3):231-235.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Oxidation of Silicon Nitride Layer
J Electr Electron Mater. 1994;7(3):231-235.
Close