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실리콘 다층절연막의 전기전도 특성

정윤해, 한원열, 박영걸

The Electrical Conduction Characteristics of the Multi - Dielectric Silicon Layer

Yun hae Chung, Won yul Han, Young kull Park
J Electr Electron Mater 1994;7(2):145-149.
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The Electrical Conduction Characteristics of the Multi - Dielectric Silicon Layer
J Electr Electron Mater. 1994;7(2):145-149.
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The Electrical Conduction Characteristics of the Multi - Dielectric Silicon Layer
J Electr Electron Mater. 1994;7(2):145-149.
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