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BTS 방법을 사용한 Low-K 유전체 물질들과 산화막의 Cu 드리프트 확산에 대한 비교 연구

추순남, 권정열, 김장원, 박정철, 이헌용

A Comparative Study on Cu Drift Diffusion of Low-k Dielectrics and Thermal Oxide by use of BTS Technique

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J Electr Electron Mater 2007;20(2):106-112.
Published online: February 1, 2007
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A Comparative Study on Cu Drift Diffusion of Low-k Dielectrics and Thermal Oxide by use of BTS Technique
J Electr Electron Mater. 2007;20(2):106-112.   Published online February 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Comparative Study on Cu Drift Diffusion of Low-k Dielectrics and Thermal Oxide by use of BTS Technique
J Electr Electron Mater. 2007;20(2):106-112.   Published online February 1, 2007
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