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도가니 구조 변경을 통한 6H-SiC 단결정의 직경 확장에 관한 연구

김정규, 견명옥, 서정두, 안준호, 김정곤, 구갑렬, 이원재, 김일수, 신병철

Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design

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J Electr Electron Mater 2006;19(7):673-679.
Published online: July 1, 2006
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Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design
J Electr Electron Mater. 2006;19(7):673-679.   Published online July 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design
J Electr Electron Mater. 2006;19(7):673-679.   Published online July 1, 2006
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