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반응성 스퍼터링법으로 형성시킨 PZT 커패시터의 P-E 이력곡선의 이동현상 및 피로 특성 연구

김현호, 이원종

Study on the Shift in the P-E Hysteresis Curve and the Fatigue Behavior of the PZT Capacitors Fabricated by Reactive Sputtering

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J Electr Electron Mater 2005;18(11):983-989.
Published online: November 1, 2005
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Study on the Shift in the P-E Hysteresis Curve and the Fatigue Behavior of the PZT Capacitors Fabricated by Reactive Sputtering
J Electr Electron Mater. 2005;18(11):983-989.   Published online November 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Study on the Shift in the P-E Hysteresis Curve and the Fatigue Behavior of the PZT Capacitors Fabricated by Reactive Sputtering
J Electr Electron Mater. 2005;18(11):983-989.   Published online November 1, 2005
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