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센서,기능성 박막 ; DC 마그네트론 스퍼터링 NiCr 박막의 열처리 조건에 따른 미세구조 및 표면특성

권용, 김남훈, 최동유, 이우선, 서용진, 박진성

Micro Structure and Surface Characteristics of NiCr Thin Films Prepared by DC Magnetron Sputter according to Annealing Conditions

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J Electr Electron Mater 2005;18(6):554-559.
Published online: June 1, 2005
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Micro Structure and Surface Characteristics of NiCr Thin Films Prepared by DC Magnetron Sputter according to Annealing Conditions
J Electr Electron Mater. 2005;18(6):554-559.   Published online June 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Micro Structure and Surface Characteristics of NiCr Thin Films Prepared by DC Magnetron Sputter according to Annealing Conditions
J Electr Electron Mater. 2005;18(6):554-559.   Published online June 1, 2005
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