Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

Min Jong Geum; Gyeong Hwan Kim

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대향타겟스퍼터링법에 의한 FBAR용 AZO(ZnOAl) 박막의 제작

금민종, 김경환

Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

Min Jong Geum, Gyeong Hwan Kim

J Electr Electron Mater 2004;17(4):422-425.
Published online: April 1, 2004

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Keywords: AZO, ZnO:Al, FTS, Piezoelectric

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Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

J Electr Electron Mater. 2004;17(4):422-425. Published online April 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

J Electr Electron Mater. 2004;17(4):422-425. Published online April 1, 2004

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대향타겟스퍼터링법에 의한 FBAR용 AZO(ZnOAl) 박막의 제작

Preparation AZO(ZnOAl) Thin Film for FBAR by FTS Method

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