Characterization of Pt/BLT/CeO2/Si Structures using CeO2 Buffer Layer

Jeong Mi Lee; Gyeong Tae Kim; Chang Il Kim

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CeO2 Buffer Layer를 이용한 Pt/BLT/CeO2/Si 구조의 특성

이정미, 김경태, 김창일

Characterization of Pt/BLT/CeO2/Si Structures using CeO2 Buffer Layer

Jeong Mi Lee, Gyeong Tae Kim, Chang Il Kim

J Electr Electron Mater 2003;16(10):865-870.
Published online: October 1, 2003

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Keywords: MFIS, BLT, CeO2, Memory window, MOD

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Characterization of Pt/BLT/CeO2/Si Structures using CeO2 Buffer Layer

J Electr Electron Mater. 2003;16(10):865-870. Published online October 1, 2003

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Characterization of Pt/BLT/CeO2/Si Structures using CeO2 Buffer Layer

J Electr Electron Mater. 2003;16(10):865-870. Published online October 1, 2003

Articles

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CeO2 Buffer Layer를 이용한 Pt/BLT/CeO2/Si 구조의 특성

Characterization of Pt/BLT/CeO2/Si Structures using CeO2 Buffer Layer

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