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CMOS 소자를 위한 NiSi의 Surface Damage 의존성

지희환, 안순의, 배미숙, 이헌진, 오순영, 이희덕, 왕진석

The Dependency of Surface Damage to NiSi for CMOS Technology

Hee Hwan Ji, Soon Eui Ahn, Mi Suk Bae, Hun Jin Lee, Soon Young Oh, Hi Deok Lee, Jin Suk Wang
J Electr Electron Mater 2003;16(4):280-285.
Published online: April 1, 2003
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The Dependency of Surface Damage to NiSi for CMOS Technology
J Electr Electron Mater. 2003;16(4):280-285.   Published online April 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Dependency of Surface Damage to NiSi for CMOS Technology
J Electr Electron Mater. 2003;16(4):280-285.   Published online April 1, 2003
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