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Rf-sputtering 법으로 증착한 PZT 박막의 타겟의 Pb 함량에 따른 전기적 특성에 관한 연구

이규일, 강현일, 박영, 박기엽, 송준태

Electrical Characteristics of PZT Thin Film - Deposited by Rf-magnetron Sputtering as Pb Excess Content of Target

Kyu Il Lee, Hyun Il Kang, Young Park, Ki Yub Park, Joon Tae Song
J Electr Electron Mater 2003;16(3):186-189.
Published online: March 1, 2003
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Electrical Characteristics of PZT Thin Film - Deposited by Rf-magnetron Sputtering as Pb Excess Content of Target
J Electr Electron Mater. 2003;16(3):186-189.   Published online March 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Electrical Characteristics of PZT Thin Film - Deposited by Rf-magnetron Sputtering as Pb Excess Content of Target
J Electr Electron Mater. 2003;16(3):186-189.   Published online March 1, 2003
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