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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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SION 박막 증착에 사용된 플라즈마에 대한 진단

김기현, 김현석, 성만영, 김상식

Diagnosis on Plasma Utilized for the Deposition of SION Thin Films

Ki Hyun Keem, Hyun Suk Kim, Man Young Sung, Sang Sig Kim
J Electr Electron Mater 2003;16(1):11-18.
Published online: January 1, 2003
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Diagnosis on Plasma Utilized for the Deposition of SION Thin Films
J Electr Electron Mater. 2003;16(1):11-18.   Published online January 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Diagnosis on Plasma Utilized for the Deposition of SION Thin Films
J Electr Electron Mater. 2003;16(1):11-18.   Published online January 1, 2003
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