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Cl2/Ar 유도 결합 플라즈마에 의한 gold 박막의 식각특성

장윤성, 김동표, 김창일, 장의구, 이수재

Etching Characteristics of Gold Thin Films using Inductively Coupled Cl2/Ar Plasma

Yun Seong Chang, Dong Pyo Kim, Chang Il Kim, Eui Goo Chang, Su Jae Lee
J Electr Electron Mater 2002;15(12):1011-1015.
Published online: December 1, 2002
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Etching Characteristics of Gold Thin Films using Inductively Coupled Cl2/Ar Plasma
J Electr Electron Mater. 2002;15(12):1011-1015.   Published online December 1, 2002
Download Citation

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Etching Characteristics of Gold Thin Films using Inductively Coupled Cl2/Ar Plasma
J Electr Electron Mater. 2002;15(12):1011-1015.   Published online December 1, 2002
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