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급속열산화방법으로 형성된 InP 자연산화막의 특성

김선태, 문동찬

Properties of InP Native Oxide Films Prepared by Rapid Thermal Oxidation Method .

Seon Tai KIM, Dong Chan MOON
J Electr Electron Mater 1992;5(4):385-392.
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Properties of InP Native Oxide Films Prepared by Rapid Thermal Oxidation Method .
J Electr Electron Mater. 1992;5(4):385-392.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Properties of InP Native Oxide Films Prepared by Rapid Thermal Oxidation Method .
J Electr Electron Mater. 1992;5(4):385-392.
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