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Buffer layer 의 표면 거칠기와 열처리조건이 GaN 에피층의 품질에 미치는 영향

유충현, 심형관, 강문성

Effects of Surface Roughness and Thermal Treatment of Buffer Layer on the Quality of GaN Epitaxial Layers

Choong Hyun Yoo, Hyuong Kwan Sim, Moon Sung Kang
J Electr Electron Mater 2002;15(7):564-569.
Published online: July 1, 2002
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Effects of Surface Roughness and Thermal Treatment of Buffer Layer on the Quality of GaN Epitaxial Layers
J Electr Electron Mater. 2002;15(7):564-569.   Published online July 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Effects of Surface Roughness and Thermal Treatment of Buffer Layer on the Quality of GaN Epitaxial Layers
J Electr Electron Mater. 2002;15(7):564-569.   Published online July 1, 2002
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