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고전압 : 고전압 방전 플라즈마에 의한 질화탄소 박막 증착 시 플라즈마 영역에 가한 레이저 애블레이션의 효과

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High Voltage Engineering : Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition

Jong Il Kim
J Electr Electron Mater 2002;15(6):551-557.
Published online: June 1, 2002
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High Voltage Engineering : Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition
J Electr Electron Mater. 2002;15(6):551-557.   Published online June 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
High Voltage Engineering : Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition
J Electr Electron Mater. 2002;15(6):551-557.   Published online June 1, 2002
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