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고전압 : 비열플라즈마를 이용한 CF4 분해에 미치는 혼합가스의 영향

박재윤, 정장근, 김종석, 김광수, 임근희

High Voltage Engineering : Effect of Mixed Gases on Decomposition Characteristic of CF4 by Non - Thermal Plasma

Jae Yoon Park, Jang Gun Jung, Jong Seck Kim, Kwang Soo Kim, Keun Hee Lim
J Electr Electron Mater 2002;15(6):543-550.
Published online: June 1, 2002
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High Voltage Engineering : Effect of Mixed Gases on Decomposition Characteristic of CF4 by Non - Thermal Plasma
J Electr Electron Mater. 2002;15(6):543-550.   Published online June 1, 2002
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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High Voltage Engineering : Effect of Mixed Gases on Decomposition Characteristic of CF4 by Non - Thermal Plasma
J Electr Electron Mater. 2002;15(6):543-550.   Published online June 1, 2002
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