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강유전체 YMnO3 박막 식각에 대한 CF4 첨가효과

박재화, 김경태, 김창일, 장의구, 이철인

Effect of CF4 Addition on Ferroelectric YMnO3 Thin Film Etching

Jae Hwa Park, Kyoung Tae Kim, Chang Il Kim, Eui Goo Chang, Cheol In Lee
J Korean Inst Electr Electron Mater Eng 2002;15(4):314-318.
Published online: April 1, 2002
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Effect of CF4 Addition on Ferroelectric YMnO3 Thin Film Etching
J Korean Inst Electr Electron Mater Eng. 2002;15(4):314-318.   Published online April 1, 2002
DOI: https://doi.org/10.4313/JKEM.2002.15.4.314
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Include:
Effect of CF4 Addition on Ferroelectric YMnO3 Thin Film Etching
J Korean Inst Electr Electron Mater Eng. 2002;15(4):314-318.   Published online April 1, 2002
DOI: https://doi.org/10.4313/JKEM.2002.15.4.314
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