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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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센서 , 기능성박막 : SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량센서의 특성

정귀상, 김미목, 남태철

Sensor , Thin Film : Characteristies of Hot - Film Type Micro - Flowsensors Fabricated on SOI Membrane and Trench Structures

Gwiy Sang Chung, Mi Mok Kim, Tae CHul Nam
J Electr Electron Mater 2001;14(8):658-662.
Published online: August 1, 2001
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Sensor , Thin Film : Characteristies of Hot - Film Type Micro - Flowsensors Fabricated on SOI Membrane and Trench Structures
J Electr Electron Mater. 2001;14(8):658-662.   Published online August 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Sensor , Thin Film : Characteristies of Hot - Film Type Micro - Flowsensors Fabricated on SOI Membrane and Trench Structures
J Electr Electron Mater. 2001;14(8):658-662.   Published online August 1, 2001
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