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유도결합 플라즈마에 의해 식각된 PZT 박막의 식각 Damage 개선

강명구, 김경태, 김창일

Recovery of Etching Damage of Etched PZT Thin Film by Inductively Coupled Plasma

Myoung Gu Kang, Kyoung Tae Kim, Chang Il Kim
J Korean Inst Electr Electron Mater Eng 2001;14(7):551-556.
Published online: July 1, 2001
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Recovery of Etching Damage of Etched PZT Thin Film by Inductively Coupled Plasma
J Korean Inst Electr Electron Mater Eng. 2001;14(7):551-556.   Published online July 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Recovery of Etching Damage of Etched PZT Thin Film by Inductively Coupled Plasma
J Korean Inst Electr Electron Mater Eng. 2001;14(7):551-556.   Published online July 1, 2001
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