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센서 , 기능성 박막 RF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구

박용욱, 신현용, 박정흠, 강종윤, 심성훈, 최지원, 윤석진, 김현재, 김경환, 최형욱

Sensor , Thin Film A Study on the ZnO Thin Film SAW Filter by RF Sputter

Yong Wook Park, Hyun Yong Shin, Jeong Heum Park, Chong Yun Chang, Sung Hun Sim, Ji Won Choi, Seok Jin Yoon, Hyun Jai Kim, Kyung Hwan Kim, Hyung Wook Choi
J Electr Electron Mater 2001;14(6):481-486.
Published online: June 1, 2001
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Sensor , Thin Film A Study on the ZnO Thin Film SAW Filter by RF Sputter
J Electr Electron Mater. 2001;14(6):481-486.   Published online June 1, 2001
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Sensor , Thin Film A Study on the ZnO Thin Film SAW Filter by RF Sputter
J Electr Electron Mater. 2001;14(6):481-486.   Published online June 1, 2001
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