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Ru/RuO2 금속 / 산화물 이중전극 위에 증착한 PZT 박막의 전기적 특성

정규원, 박영, 송준태

Electrical Properties of PZT Thin Films Deposited on the Ru/RuO2 Metal / Oxide Hybrid Electrodes

Kyu Won Jeong, Young Park, Joon Tae Song
J Electr Electron Mater 2001;14(4):281-288.
Published online: April 1, 2001
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Electrical Properties of PZT Thin Films Deposited on the Ru/RuO2 Metal / Oxide Hybrid Electrodes
J Electr Electron Mater. 2001;14(4):281-288.   Published online April 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical Properties of PZT Thin Films Deposited on the Ru/RuO2 Metal / Oxide Hybrid Electrodes
J Electr Electron Mater. 2001;14(4):281-288.   Published online April 1, 2001
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