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플라즈마 화학기상 증착방식으로 성장시킨 비정질 실리콘 카바이드 박막의 열처리 효과에 관한 특성분석

박문기, 김용탁, 최원석, 윤대호, 홍병유

Investigation of Annealing Effect for a SiC : H Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition

Mun Gi Park, Yong Tak Kim, Won Seok Choi, Dae Ho Yoon, Byoung You Hong
J Electr Electron Mater 2000;13(10):817-821.
Published online: October 1, 2000
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Investigation of Annealing Effect for a SiC : H Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 2000;13(10):817-821.   Published online October 1, 2000
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Investigation of Annealing Effect for a SiC : H Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 2000;13(10):817-821.   Published online October 1, 2000
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