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반도체 / 메모리 소자 응용을 위한 펄스 레이저 증착법으로 제작된 PLT 박막의 열처리 효과

허창회, 심경석, 이상렬

Annealing Effect of Pb(La,Ti)O3 Thin Films Grown by Pulsed Laser Deposition for Memory Device Application

Chang Hoi Hur, Kyung Suk Shim, Sang Yeol Lee
J Electr Electron Mater 2000;13(9):725-728.
Published online: September 1, 2000
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Annealing Effect of Pb(La,Ti)O3 Thin Films Grown by Pulsed Laser Deposition for Memory Device Application
J Electr Electron Mater. 2000;13(9):725-728.   Published online September 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Annealing Effect of Pb(La,Ti)O3 Thin Films Grown by Pulsed Laser Deposition for Memory Device Application
J Electr Electron Mater. 2000;13(9):725-728.   Published online September 1, 2000
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