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센서 기능성박막 / 고온용 실리콘 홀 센서의 제작

정귀상, 류지구

Fabrication of a Silicon Hall Sensor for High - temperature Applications

Gwiy Sang Chung, Ji Goo Ryu
J Electr Electron Mater 2000;13(6):514-519.
Published online: June 1, 2000
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Fabrication of a Silicon Hall Sensor for High - temperature Applications
J Electr Electron Mater. 2000;13(6):514-519.   Published online June 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Fabrication of a Silicon Hall Sensor for High - temperature Applications
J Electr Electron Mater. 2000;13(6):514-519.   Published online June 1, 2000
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