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YMnO3
WHERE t1.sid in(parameter_dbtbl_keyword '%YMnO3%') and t1.xml_status <> 99
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Kyoung Tae Kim (1)
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"YMnO3"
Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma
Jae Hwa Park, Kyoung Tae Kim, Dong Pyo Kim, Chang Il Kim, Eui Goo Chang
J Korean Inst Electr Electron Mater Eng
2003;16(6):449-453.
Published online June 1, 2003
DOI:
https://doi.org/10.4313/JKEM.2003.16.6.449
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