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Wafer direct bonding
WHERE t1.sid in(parameter_dbtbl_keyword '%Wafer direct bonding%') and t1.xml_status <> 99
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"Wafer direct bonding"
Bonding Property of Silicon Wafer Pairs with Annealing Method
Hong Seok Min, Sang Hyun Lee, Oh Sung Song, Young Chang Joo
J Electr Electron Mater
2003;16(5):365-371.
Published online May 1, 2003
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