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Via contact resistance
WHERE t1.sid in(parameter_dbtbl_keyword '%Via contact resistance%') and t1.xml_status <> 99
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Chemical vapor deposition (1)
SiH4 soak (1)
Ti/TIN barrier metal (1)
Tungsten (W) plug (1)
Via contact resistance (1)
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2003 (1)
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Sang Yong Kim (1)
Woo Sun Lee (1)
Jin Seung Park (1)
Yong Jin Seo (1)
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SiH4 soak (1)
Ti/TIN barrier metal (1)
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Via contact resistance (1)
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"Via contact resistance"
SIH4 Soak Effects in the W plug CVD Process
Woo Sun Lee, Yong Jin Seo, Sang Yong Kim, Jin Seung Park
J Electr Electron Mater
2003;16(1):1-4.
Published online January 1, 2003
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