Probe card-Type multizone electrostatic chuck inspection system Yoon Sung Koo, Jae Hwan Kim, Chan Su Han, Sang Jeen Hong Automatika.2023; 64(2): 389. CrossRef
Optimization of Thermal Deformation in Probe Card Yong-Hoon Chang, Jeong-Je Yin, Yong-S. Suh Journal of the Korea Academia-Industrial cooperation Society.2010; 11(11): 4121. CrossRef