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Valve
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"Valve"
Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator
Gwi Sang Jeong, Jae Min Kim, Seog Jin Yun
J Korean Inst Electr Electron Mater Eng
2004;17(5):515-520.
Published online May 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.5.515
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