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적층형 세라믹 엑추에이터를 이용한 MEMS용 압전밸브의 제작 및 특성

정귀상, 김재민, 윤석진

Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator

Gwi Sang Jeong, Jae Min Kim, Seog Jin Yun
J Electr Electron Mater 2004;17(5):515-520.
Published online: May 1, 2004
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Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator
J Electr Electron Mater. 2004;17(5):515-520.   Published online May 1, 2004
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator
J Electr Electron Mater. 2004;17(5):515-520.   Published online May 1, 2004
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