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"Ti adhesion layer"

Regular Paper : Effect of Ti Adhesion Layer on the Electrical Properties of BMNO Capacitor Using Graphene Bottom Electrodes
Byeong Ju Park, Soon Gil Yoon
J Electr Electron Mater 2013;26(12):867-871.   Published online December 1, 2013
The Ti adhesion layers were deposited onto the glass substrate for transparent capacitors using Bi2Mg2/3Nb4/3O7 (BMNO) dielectric thin films. Graphene was transferred onto the Ti/glass substrate after growing onto the Ni/SiO2/Si using rapid-thermal pulse CVD (RTPCVD). The BMNO dielectric thin films were investigated for the microstructure, dielectric and leakage properties in the case of capacitors with and without Ti adhesion layers. Leakage current and dielectric properties were strongly dependent on the Ti adhesion layers grown for graphene bottom electrode.
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