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"Thermal evaporation"

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"Thermal evaporation"

Improved Electrical Stability of In₂O₃ Thin-Film Transistors Through Temperature-Controlled H₂O₃ Processes
Jeong Hun Choi, Jae-yun Lee, Beom Gu Lee, Jeong Moo Seo, Sung-jin Kim
J Electr Electron Mater 2025;38(4):418-424.   Published online July 1, 2025
DOI: https://doi.org/10.4313/JKEM.2025.38.4.10
In this study, we investigated the electrical stability and performance enhancement of In₂O₃ thin-film transistors (TFTs) through hydrogen peroxide (H₂O₂) and ultraviolet (UV) treatment under controlled temperature conditions. The In₂O₃ TFTs were fabricated using a sol-gel process, followed by H₂O₂ treatment at 40, 50, and 60℃ in combination with UV irradiation. The impact of these processing conditions on the device characteristics, including mobility (μ), threshold voltage (Vth), subthreshold swing (S/S), and on/off current ratio, was systematically analyzed. The results indicate that the 50℃ TFTs exhibited the most stable electrical performance, with minimal Vth shift under negative bias stress (NBS) conditions and optimized switching behavior. Furthermore, static inverter measurements confirmed the reliable voltage transfer characteristics (VTCs) and gain performance of the optimized In₂O₃ TFTs. These findings suggest that the proposed H₂O₂ and UV treatment technique can effectively improve the reliability and long-term stability of In₂O₃-based electronic devices, making them promising candidates for future electronic applications.
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Effect of Mn on the Growth of ZnO Crystals via a Thermal Evaporation of Zn-Mn Mixture
Geun Hyoung Lee
J Electr Electron Mater 2014;27(7):443-447.   Published online July 1, 2014
ZnO crystals with different morphologies were synthesized through a thermal evaporation of Zn-Mn mixtures in air. The morphology was dependant on the Mn content in Zn-Mn mixture. The morphology was changed from rod to tetrapod shape with decreasing Mn content in Zn-Mn mixture. There sult indicates that the concentration of Mn might be responsible for the different morphologies of ZnOcrystals. XRD spectra showed that the ZnO crystals had a hexagonal wurtzite crystal strutures. For all the samples, room temperature cathodoluminescence spectra showed a ultra-violet emission at 380 nm and a green emission at around 500 nm. However, the intensity ratio of ultra-violet emission to green emission was significantly different with the Mn content in the source material.
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Tubular-shaped ZnO Crystals by Thermal Evaporation Technique in Air
Jung Hun Lee, Geun Hyoung Lee, Choon Woo Nahm
J Electr Electron Mater 2014;27(3):141-145.   Published online March 1, 2014
Tubular-shaped ZnO crystals were synthesized by thermal evaporation technique under air atmosphere. Mixture of Zn and Mg powder was used as the source material. The thermal evaporation and oxidation of Zn/Mg mixture were carried out for 1 hr at 1,000℃ and 1,200℃ under in air under atmospheric pressure. When only Zn powder was used as a source material, tetrapod-shaped ZnO crystals were synthesized. This provides that Mg played a key role in the formation of the tubular-shaped crystals. SEM images showed that the tubular-shaped ZnO crystals grew along [0001] direction. XRD spectrum revealed that the ZnO tubes had hexagonal wurtzite structure. Two emission peaks at 380 nm and 510 nm were observed in the room temperature cathodoluminescence spectrum.
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ZnO Octahedron Fabricated by Thermal Evaporation Technique in Air
Geun Hyoung Lee
J Electr Electron Mater 2013;26(4):294-297.   Published online April 1, 2013
ZnO crystals with octahedral shape were synthesized by thermal evaporation technique. ZnF2 powder was used as the source material. The thermal evaporation and oxidation of ZnF2 powder was carried out for 1 hr at 1,000℃ in air under atmospheric pressure. SEM images showed that the ZnO crystals produced by oxidizing ZnF2 vapor possessed a characteristic octahedral shape. XRD spectrum revealed that the ZnO octahedron had hexagonal wurtzite structure. In the room temperature photoluminescence spectrum, a strong green emission peak at around 510 nm was observed.
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Effect of Oxygen Pressure on the Morphology of ZnO Nanostructures Fabricated by Thermal Evaporation Technique
Geun Hyoung Lee, Jung Hun Lee
J Electr Electron Mater 2012;25(11):873-877.   Published online November 1, 2012
The effect of oxygen pressure in the synthesis of ZnO nanostructures through thermal evaporation of Zn powder was investigated. The thermal evaporation process was carried out in oxygen ambient for 1 hr at 1,000℃ under different pressures. The oxygen pressure was changed in range of 0.5 ? 900 Torr. Any nanostructure was not formed on the specimens prepared at oxygen pressures lower than 10 Torr. When oxygen pressure was 100 Torr, ZnO nanowires were observed. With increasing the oxygen pressure to 500 Torr, the morphology of ZnO nanostructures changed from wire to tetrapod. For all the samples, room temperature photoluminescence spectra show a strong green emission peak at around 550 nm.
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Thin Films and Sensors : Synthesis of Metal Oxide Semiconductor Nanostructures and Their Gas Sensing Properties
Jong Heun Lee, Kwon Il Choi
J Electr Electron Mater 2012;25(8):632-638.   Published online August 1, 2012
The prepartion of various metal oxide nanostructures via hydrothermal method, hydrolysis, thermal evaporation and electrospinning and their applications to chemoresistive sensors have been investigated. Hierarchical and hollow nanostructures prepared by hydrothermal method and hydrolysis showed the high response and fast responding kinetics on account of their high gas accessibility. Thermal evaporation and electrospinning provide the facile routes to prepare catalyst-loaded oxide nanowires and nanofibers, respectively. The loading of noble metal and metal oxide catalyst were effective to achieve rapid response/recovery and selective gas detection.
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Nano Materials and Devices : Investigation on Growth Characteristic of ZnO Nanostructure with Various O2 Pressures by Thermal Evaporation Process
Kyoung Bum Kim, Yong Ho Jang, Chang Il Kim, Young Hun Jeong, Young Jin Lee, Jeong Ho Jo, Jong Hoo Paik, Sahn Nahm
J Electr Electron Mater 2011;24(10):839-843.   Published online October 1, 2011
ZnO nanostructures were developed on a Si (100) substrate from powder mixture of ZnO and 5 mol% Pd (ZP-5) as reactants by × sccm oxygen pressures(x= 0, 10, 20, 40). DTA (differential thermal analysis) result shows the Pd(5 mol%)+ZnO mixtured powder(PZ-5) is easily evaporated than pure ZnO powder. The PZ-5 mixtured powder was characterized by DTA to determine the thermal decomposition which was found to be at 800℃, 1,100℃. Weight loss(%) and ICP (inductively coupled plasma) analysis reveal that Zn vaporization is decreased by increased oxygen pressures from the PZ-5 at 1,100℃ for 30 mins. Needle-like ZnO nanostructures array developed from 10 sccm oxygen pressure, was well aligned vertically on the Si substrate at 1,100℃ for 30 mins. The lengths of the Needle-like ZnO nanostructures is about 2 μm with diameters of about 65 nm. The developed ZnO nanostructures exhibited growth direction along [001] with defect-free high crystallinity. It is considered that Zn vaporization is responsible for the growth of Needle-like ZnO nanostructures by controlling the oxygen pressures. The photoluminescence spectra of ZnO nanostructures exhibited stronger 376.7 nm NBE (near band-edge emission) peak and 529.3 nm DLE (deep level energy) peak.
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The Structural and Electrical Properties of CdSe Films Deposited at Low Temperature
Ki Cheol Park, Tae Young Ma
J Electr Electron Mater 2010;23(10):776-781.   Published online October 1, 2010
CdSe films were deposited on glass substrates (CdSe/glass) by thermal evaporation. Substrate temperature was lowered by cooling substrate holder with liquid nitrogen. Substrate temperatures were 200℃, 0℃ and -40℃. The crystallographic properties and surface morphologies of the CdSe/glass films were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The optical and electrical properties of the films were investigated by dependence of energy gap, photosensitivity and resistivity on the substrate temperature. CdSe/glass showed energy gap of ~1.72 eV regardless of substrate temperature. The resistivity of the films decreased to 0.5 Ωcm by lowering the substrate temperature to -40℃. The CdSe/glass films prepared at 0℃ showed the highest photosensitivity among the films in this study.
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Display and Optical Devices : Efficient Top-Emitting Organic Light Emitting Diode with Surface Modified Silver Anode
Sung Jun Kim, Ki Hyon Hong, Ki Soo Kim, Ill Hwan Lee, Jong Lam Lee
J Electr Electron Mater 2010;23(7):550-553.   Published online July 1, 2010
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Characteristics of ZnO Nanowire Fabricated by Thermal Evaporation Method Depending on Different Temperatures and Oxygen Pressure
Won Seok Oh, Gun Eik Jang
J Electr Electron Mater 2008;21(8):766-769.   Published online August 1, 2008
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Study on CeO2 Singe Buffer on RABiTS for SmBCO coated Conductor
J Electr Electron Mater 2007;20(6):546-549.   Published online June 1, 2007
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Shape Control and Characterization of One-dimensional ZnO Nanostructures through the Synthesis Procedure
J Electr Electron Mater 2006;19(1):13-17.   Published online January 1, 2006
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