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TIN-Capping
WHERE t1.sid in(parameter_dbtbl_keyword '%TIN-Capping%') and t1.xml_status <> 99
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"TIN-Capping"
The Dependency of Surface Damage to NiSi for CMOS Technology
Hee Hwan Ji, Soon Eui Ahn, Mi Suk Bae, Hun Jin Lee, Soon Young Oh, Hi Deok Lee, Jin Suk Wang
J Electr Electron Mater
2003;16(4):280-285.
Published online April 1, 2003
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