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"TCP-CVD"

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"TCP-CVD"

Thin Films and Sensors : Application of Si3N4 Thin Film as a Humidity Protection Layer for Organic Light Emitting Diode
Chang Jo Kim, Paik Kyun Shin
J Korean Inst Electr Electron Mater Eng 2010;23(5):397-402.   Published online May 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.5.397

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  • Optimization of a SiOx/SiNxOyCz multilayer structure for a reliable gas diffusion barrier via low-temperature plasma-enhanced atomic layer deposition
    Ju-Hwan Han, Su Ho Lim, Jin-Myung Choi, Seong-Hyeon Lee, Woojin Jeon, Jin-Seong Park
    Ceramics International.2019; 45(6): 7407.     CrossRef
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A Study on the Silicon Nitride for the poly-Si Thin Film Transistor
Do Yeong Kim, Chi Hyeong Kim, Jae Gyeong Go, Jun Sin Lee
J Korean Inst Electr Electron Mater Eng 2003;16(12s):1175-1180.
DOI: https://doi.org/10.4313/JKEM.2003.16.12s.1175
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