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TCP-CVD
WHERE t1.sid in(parameter_dbtbl_keyword '%TCP-CVD%') and t1.xml_status <> 99
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"TCP-CVD"
Thin Films and Sensors : Application of Si3N4 Thin Film as a Humidity Protection Layer for Organic Light Emitting Diode
Chang Jo Kim, Paik Kyun Shin
J Electr Electron Mater
2010;23(5):397-402.
Published online May 1, 2010
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A Study on the Silicon Nitride for the poly-Si Thin Film Transistor
Do Yeong Kim, Chi Hyeong Kim, Jae Gyeong Go, Jun Sin Lee
J Electr Electron Mater
2003;16(12s):1175-1180.
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