A Study on the Silicon Nitride for the poly-Si Thin Film Transistor

Do Yeong Kim; Chi Hyeong Kim; Jae Gyeong Go; Jun Sin Lee

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다결정 박막 트랜지스터 적용을 위한 SiNx 박막 연구

김도영, 김치형, 고재경, 이준신

A Study on the Silicon Nitride for the poly-Si Thin Film Transistor

Do Yeong Kim, Chi Hyeong Kim, Jae Gyeong Go, Jun Sin Lee

J Electr Electron Mater 2003;16(12s):1175-1180.

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Keywords: Polycrystalline thin film tranistor, SiNx, TCP-CVD, N2 plasma treatment, Leakage current

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A Study on the Silicon Nitride for the poly-Si Thin Film Transistor

J Electr Electron Mater. 2003;16(12s):1175-1180.

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A Study on the Silicon Nitride for the poly-Si Thin Film Transistor

J Electr Electron Mater. 2003;16(12s):1175-1180.

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다결정 박막 트랜지스터 적용을 위한 SiNx 박막 연구

A Study on the Silicon Nitride for the poly-Si Thin Film Transistor

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