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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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"Synchronous"

Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater 2008;21(4):354-361.   Published online April 1, 2008
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