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Surface damage
WHERE t1.sid in(parameter_dbtbl_keyword '%Surface damage%') and t1.xml_status <> 99
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"Surface damage"
The Dependency of Surface Damage to NiSi for CMOS Technology
Hee Hwan Ji, Soon Eui Ahn, Mi Suk Bae, Hun Jin Lee, Soon Young Oh, Hi Deok Lee, Jin Suk Wang
J Korean Inst Electr Electron Mater Eng
2003;16(4):280-285.
Published online April 1, 2003
DOI:
https://doi.org/10.4313/JKEM.2003.16.4.280
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