Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Surface MEMS
WHERE t1.sid in(parameter_dbtbl_keyword '%Surface MEMS%') and t1.xml_status <> 99
1
results for
"Surface MEMS"
Filter
Keywords
Capacitive pressure sensors (1)
FEM (1)
Poly 3C-SiC (1)
Surface MEMS (1)
Publication year
2010 (1)
Authors
Kwang Ho Kim (1)
Sang Soo Noh (1)
Jeong Hwan Seo (1)
Keywords
Capacitive pressure sensors (1)
FEM (1)
Poly 3C-SiC (1)
Surface MEMS (1)
Cancel
Close
authors
Kwang Ho Kim (1)
Sang Soo Noh (1)
Jeong Hwan Seo (1)
Cancel
Close
Publication Year
2010 (1)
Cancel
Close
Funded articles
Cancel
Close
"Surface MEMS"
Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications
Jeong Hwan Seo, Sang Soo Noh, Kwang Ho Kim
J Electr Electron Mater
2010;23(4):317-322.
Published online April 1, 2010
PDF
8
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
